High electromechanical-coupling coefficient surface acoustic wave device

摘要

A high electromechanical-coupling surface acoustic wave device has a lithium niobate rotated Y-cut crystal as a piezoelectric substrate, and a thin high-density film formed on a predetermined portion of the lithium niobate rotated Y-cut crystal which includes at least a propagation path along which the surface acoustic wave propagates. A Love wave propagates in the thin or thick high-density film on the surface of the lithium niobate rotated Y-cut crystal substrate, so that the electromechanical coupling coefficient of the thin film can be improved, and spurious response caused by a Rayleigh wave can be eliminated.