MEASURING APPARATUS FOR PHYSICAL PROPERTY VALUE AND SURFACE TEMPERATURE OF PROCESSED MATERIAL

摘要

PURPOSE: To simultaneously measure the value of physical properties of the surface of a processed material and the surface temperature thereof by searching and calculating the value of physical properties from the luminous temperature obtained by a two-color pyrometer, and performing two-color pyrometry by means of an operating means. ;CONSTITUTION: An operating block 12 calculates the power ratio of the emissivity ε1^λ1/ε2^λ2 in accordance with the calculating formula with the use of the luminous temperatures S1, S2 input from a two-color pyrometer 10. In the formula, C2 indicates plank's second constant of. An operating block 14 calculates a first emissivity ratio from the power ratio, and a temperature calculating block 16 calculates tone surface temperature T. A presuming block 18 presumes and sets the thickness (d) of an oxide film at an optional value. An operating block 20 calculates the emissivity from the presuming value of the film thickness and the measuring two wavelength λ₁, λ₂. A dividing block 22 calculates a second emissivity ratio. A judging block 24 obtains the difference of the second emissivity ratio and the first emissivity ratio. The correcting amount Δd is calculated in a block 26 when the square H of the difference is not equal to 0. The film thickness (d) is corrected in a block 28. While the operations are repeated with using the (d), the (d) is output when the H becomes approximately 0. Accordingly, both the surface temperature T and the film thickness (d) of the oxide film can be measured.;COPYRIGHT: (C)1993,JPO&Japio