PURPOSE:To enable decomposing fluorocarbons and halons efficiently at a comparatively low temperature by using various catalysts under plasma discharge to effect reaction with water vapor. CONSTITUTION:Low frequency discharge, high frequency discharge, microwave discharge, etc., are used as plasma discharge, and inert gases such as nitrogen, argon and helium are desirable as atmospheric gas other than reaction gases and air, etc., can be used too. A catalyst to be used may be any of nickel type, titania type, chromium oxide type, alumina type and palladium type catalysts, etc., so as not to be limited but a catalyst having halogen resisting properties is desirable because hydrogen fluoride and hydrogen chloride are generated as reaction products. 1.5g of titania-zirconia type catalyst 5 is placed in a bell- jar type reactor 3 equipped with a plasma generation power supply and electrode, CFC-113 and water vapor are injected so as to be 400ppm and 3000ppm in 1.2Torr of nitrogen, respectively, and a decomposition reaction is caused to take place under plasma discharge.
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