Plasma resolution device and resolution manner null of freon or

摘要

PROBLEM TO BE SOLVED: To subject fluorocarbon or fluorine compd. to plasma decomposition with high decomposition efficiency and to completely suppress the generation of harmful by-product. ;SOLUTION: Relating to the low temp. plasma decomposition device, the waste gas containing the fluorocarbon or the fluorine compd. is decomposed to a harmless material by causing the gas to flow between both electrodes 1 and 2 to which high voltage is applied. In the low temp. plasma decomposition device, a granular ferroelectric material 3 is filled between both electrodes 1 and 2 and also alumina coating layers are provided respectively at the opposite surface side of the both electrodes 1 and 2.;COPYRIGHT: (C)2001,JPO