Measuring device for plasma analysis of coated plasmas in the manner of a langmuir - probe

摘要

A wire used as a measuring probe which carries an electrical measuring current is maintained at a constant temp. to prevent the formation of surface deposts. The novelty is that the wire is connected alternately to a measuring circuit and a source of heat by a switching device; that the positive connection of the heat source can be connected with the wire prbe via the switching device; that the source of heating current is of constant potential; that the cyclical measurement period is less than one tenth of a second, and that the heating period is longer than the measurement period. USE/ADVANTAGE - The probe can be built in with only one electrical connection. This arrangement obliviates problems of contact with other materials; and that heating and measurement, which would produce errors, cannot be decoupled during the measurement process.