Thin film magnetic recording medium, magnetic disk drive, barium ferrite thin film production manner, and longitudinal magnetic recording manner

摘要

PURPOSE: To obtain a barium ferrite thin film having high magnetic characteristics, corrosion resistance and durability and intrinsic texture. ;CONSTITUTION: The thin film 60 has a front surface 65 and a base 67 forming a boundary with a substrate 70, is parallel with this substrate and is deposited by evaporation by reactive magnetron sputtering of a barium ferrite target in a coaxial sputtering system for orienting the sputtering target so as to face the substrate. This constitution exhibits the vapor deposition rate higher than the vapor deposition rate by the sputtering system to position the substrate perpendicular to the target on the circumference of the plasma without being limited by the powerful magnetic orientation perpendicular to the plane of the thin film.;COPYRIGHT: (C)1995,JPO