首页> 外国专利> MOLECULAR-BEAM EPITAXIAL GROWTH DEVICE

MOLECULAR-BEAM EPITAXIAL GROWTH DEVICE

机译:分子束表皮生长装置

摘要

PURPOSE: To control the quantity of molecular beams without using a temperature as a control means by mounting a flow variable control panel, in which two disks having hole sections are combined relatively rotatably, in front of the opening of a molecular beam cell and changing the relative angles of the two disks. ;CONSTITUTION: A molecular bean cell 3 contains a crucible 8, a heater 9, a reflector 10, a strut 11, a vacuum flange 12, a shutter 13, a thermocouple 14, etc. The crucible 8 is used as a vessel for introducing a solid raw material and heating the row material. A flow variable control panel 16 is installed on the opening of the crucible 8. Two perforated plates 17, 18 are combined rotatably centering around a certain point in the flow variable control panel 16. The flow variable control panel 16 is heated, and a heater 19 is set up to a rear so that the raw material does not adheres on plate surfaces. The two plates 17, 18 of the flow variable control panel 16 can be rotated relatively by a shaft 20. Since molecular beams fly only in a linear manner, hole areas, through which molecular beams can pass, are changed when the areas of common holes are altered.;COPYRIGHT: (C)1996,JPO
机译:目的:通过在分子束单元的开口前方安装流量可变控制面板来控制分子束的数量,而无需将温度用作控制手段,在该面板中,具有孔部分的两个圆盘可相对旋转地组合在一起,并改变分子束的数量。两个圆盘的相对角度。 ;组成:分子豆电池3包含一个坩埚8,一个加热器9,一个反射器10,一个支柱11,一个真空法兰12,一个百叶窗13,一个热电偶14等。该坩埚8用作引入容器固体原料并加热排料。流量可变控制面板16安装在坩埚8的开口上。两个多孔板17、18以流量可变控制面板16中的某个点为中心可旋转地结合。该流量可变控制面板16被加热,并且加热器将图19的装置设置在后部,以使原料不粘附在板表面上。流量可变控制面板16的两个板17、18可通过轴20相对旋转。由于分子束仅以线性方式飞行,因此当共同的孔的面积改变时,分子束可通过的孔面积被改变。 ;版权所有:(C)1996,日本特许厅

著录项

  • 公开/公告号JPH0878332A

    专利类型

  • 公开/公告日1996-03-22

    原文格式PDF

  • 申请/专利权人 NISSIN ELECTRIC CO LTD;

    申请/专利号JP19940232365

  • 发明设计人 ZENNO YOSHIAKI;

    申请日1994-08-31

  • 分类号H01L21/203;C30B23/00;

  • 国家 JP

  • 入库时间 2022-08-22 03:57:28

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号