Slow-wave circuit assembly for traveling-wave tube and method of manufacturing a slow-wave circuit assembly

摘要

In a slow-wave circuit assembly for a traveling-wave tube according to this invention, an element different from the base material of dielectric support rods (12) for supporting a slow-wave line is implanted into the base material surface of each support rod (12) to a predetermined depth at a predetermined concentration, and the electrical resistance of the surface is lower than the electrical resistance of the base material itself. In addition, the slow-wave circuit assembly for the traveling-wave tube is manufactured such that the element is ion-implanted into the surface of the dielectric support rod (12) to a predetermined depth at a predetermined dose, and then the dielectric support rod (12) is subjected to annealing in a non-oxidizing atmosphere. Therefore, in the slow-wave circuit assembly for the traveling-wave tube, the dielectric support rod (12) is suppressed from being charged in a long-time operation. The manufacturing method is good in reproducibility and assembling properties.