ITO Sintered Body, ITO Transparent Conductive Film and Method of Forming the Same (ITO SINTERED BODY, ITO TRANSPARENT CONDUCTIVE FILM AND METHOD OF FORMING THE FILM)

摘要

The SiO shown in FIG. 1₂-This₂O₃In the two-component system, SiO 2 corresponding to the region surrounded by the points A, B, C, D and E₂And Bi₂O₃ITO sintered body containing a composition and an ITO transparent conductive film containing an additive of the same composition. The transparent conductive film may be formed by using the sintered body as a target and using an inert gas alone or an inert gas with O₂And / or H₂In a mixed gas of hydrogen and oxygen. The relative density of the sintered body is as high as 90% or more, and the transparent conductive film formed thereon has a high light transmittance,^-4Cm 2 .