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Beam lead bonding apparatus and method for beam lead bonding defect detection

机译:束状引线键合缺陷检测的束状引线键合装置及方法

摘要

In the beam lead bonding apparatus for detecting a beam lead bonding failure according to the present invention, the beam head bonding current is detected by the control unit for the beam lead bonding failure detection of the head, the transducer, the beam lead bonding unit, the beam lead, the semiconductor chip, and the heater block. After sequentially passing through the feedback to the ground terminal of the control unit.;Therefore, the present invention improves the reliability of the process by detecting the intensity of the feedback current and determining the amount and defect of beam lead bonding.
机译:在根据本发明的用于检测束状引线键合失效的束状引线键合装置中,通过用于控制头部,换能器,束状引线键合单元的束状引线键合失效的控制单元来检测束头接合电流。束引线,半导体芯片和加热块。在依次将反馈传递到控制单元的接地端子之后。因此,本发明通过检测反馈电流的强度并确定束引线键合的数量和缺陷来提高过程的可靠性。

著录项

  • 公开/公告号KR19990053454A

    专利类型

  • 公开/公告日1999-07-15

    原文格式PDF

  • 申请/专利权人 윤종용;

    申请/专利号KR19970073080

  • 发明设计人 김상영;박기범;김용;홍인표;

    申请日1997-12-24

  • 分类号H01L21/60;

  • 国家 KR

  • 入库时间 2022-08-22 02:17:00

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