[0001] The present invention relates to a dry apparatus for an aluminum oxide (AlF) contact portion, and conventionally, by keeping the temperature of hexo wood and pedestal at about 7 [deg.] C, Moisture is generated in the application area of the fuse, and moisture is formed in the contact area of the fuse and the fuse of the fuse due to the moisture, thereby causing the fuse damage to the etching process due to the loss of the fuse power .;However, in the present invention, a humidity comparator is provided for attaching a humidity sensor for detecting moisture to the AL / F applied portion and the AL / F-rod portion, and for comparing the humidity set value recognized by the system CPU to control the humidity removal, Wherein the humidity comparator controls the solenoid valve, the solenoid valve drives the pneumatic valve to supply a gas gas to the ALF and the ALF, wherein the gas comprises dry N 2 , It is possible to eliminate the moisture phenomenon occurring between the FPC and the FPC to completely eliminate the FPC loss in the process, thereby ensuring the reliability of the etching process.
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