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Field emission electron gun capable of minimizing nonuniform influence of surrounding electric potential condition on electrons emitted from emitters
Field emission electron gun capable of minimizing nonuniform influence of surrounding electric potential condition on electrons emitted from emitters
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机译:能够最小化周围电势条件对发射器发射电子的不均匀影响的场发射电子枪
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摘要
In a field emission electron gun including emitters (104) on predetermined parts of a substrate (109), an insulator film (105) on a remaining part of the substrate, a first gate electrode (101) on the insulator film so as to surround the emitters with a space left between each emitter and the first gate electrode and to have an outer peripheral surface defining an emission region (E), a gate edge portion (106) of a conductor is formed on the insulator film to surround the outer peripheral surface of the first gate electrode in contact with the outer peripheral surface of the first gate electrode. A second gate electrode (102) is formed on the insulator film to surround the gate edge portion with a distance left between the gate edge portion and the second gate electrode applied with a second voltage less than a first voltage applied to the first gate electrode.
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