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PROBE FOR SCANNING NEAR-FIELD OPTICAL MICROSCOPE AND SCANNING NEAR-FIELD OPTICAL MICROSCOPE
PROBE FOR SCANNING NEAR-FIELD OPTICAL MICROSCOPE AND SCANNING NEAR-FIELD OPTICAL MICROSCOPE
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机译:扫描近场光学显微镜和扫描近场光学显微镜的探头
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摘要
PROBLEM TO BE SOLVED: To provide a probe for a scanning near-field optical microscope, in which the detecting range of scattered light is not limited and by which the scattered light in a wide range can be detected, and to provide a scanning near-field optical microscope. ;SOLUTION: A rectangular lever 12 in which a protrusion 10 is formed at its free end and a support part 14 which supports the base end of the lever 12 constitute a probe 8 for a scanning near-field optical microscope. A protrusion-part base end 200 whose tip forms a sharpened tetrahedron shape, and a scattering body 202 which is installed at the tip of the protrusion base end 200, constitute the protrusion 10. On the rear of the lever 12, a part excluding the tip region W of the lever 12 on the rear side of the protrusion 10 is coated with an aluminum film 20 in a prescribed thickness. As a result, the protrusion base end 200 and the tip region W of the lever 12 at the probe 8 are transparent with reference to the wavelength of incident light or the wavelength of light used to form an image.;COPYRIGHT: (C)1999,JPO
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