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PATTERNING METHOD PATTERNING APPARATUS PATTERNING TEMPLATE AND METHOD FOR MANUFACTURING THE PATTERNING TEMPLATE
PATTERNING METHOD PATTERNING APPARATUS PATTERNING TEMPLATE AND METHOD FOR MANUFACTURING THE PATTERNING TEMPLATE
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机译:加样方法加样设备加样模板和制造加样模板的方法
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摘要
Plate (1) is proximate to or in contact with the pattern-formed surface 111 and allows the fluid (62) formed on the pattern forming face. This method comprises proximity to the plate (1) on the pattern forming face (111) or substantially in contact with; Supplying a fluid 62, a plurality of through holes 12 provided in the pattern transfer region 10 of the plate (1) for the supply of the fluid (62) and; After the fluid 62 passes through the through hole 12 it is attached to the pattern-forming surface 111, and a separating plate (1) from the pattern forming face (111).
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