INFRARED ABSORPTION BOLOMETER WITH IMPROVED ABSORPTION EFFICIENCY

摘要

Purpose: the infrared absorption bolometer with improved absorption efficiency is arranged to realize adsorbing again for infrared ray, an absorption level is permeated by an infrared reflection film, to increase the absorption efficiency of infrared absorption bolometer. Construction: the infrared absorption bolometer with improved absorption efficiency includes that a drive substrate is horizontal(210)Including substrate(212),The more than one pair of connection terminal formed on substrate(214),An and protective layer of covering substrate(216),One maintains valence(220),Including more than a pair of of support bends(240)With a conducting wire(255)One end therein,Connection terminal corresponding with one,One absorption level(230),Including an absorption band(295),Surrounded by absorption band bolometer element(285)Electrical connection,One infrared absorption coating(297)It is formed on a top surface of absorption band,One infrared reflection film(270),It is formed under absorption level,And at least more than one pair of column(260)It is between support bending and absorption level are surrounded by an insulating materials and there is an electric arc tube(262),It is used to electrically connect the bolometer element with conducting wire,Wherein the bolometer element of absorption level electrically passes through electric arc tube and conducting wire and connects respectively with corresponding connection terminal.