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CONTRACTION MOTHER, CONTRACTION FATHER AND MANUFACTURING METHOD THEREFOR

机译:母体,母体及其制造方法

摘要

PROBLEM TO BE SOLVED: To obtain an optical recording medium of high density without shortening wavelength of a light source of an optical recording medium master disk exposure recording device (LBR) and without enlarging NA of an objective lens.;SOLUTION: A contractible material is used as a base of a photoresist master disk, a photoresist layer is formed thereon and patterning is executed to a shape corresponding to a signal, pit by using the LBR. Thereafter a base surface is subjected to etching with the photoresist layer as a masking to obtain a mother stamper 6 and then a contraction mother 7 is obtained by contracting the mother stamper 6. A stamper 9 is obtained by plating metal thereon. Injection molding is executed by using the stamper 9 as a metallic mold and a recording film or the like is deposited thereon to manufacture the optical recording medium of high density.;COPYRIGHT: (C)2001,JPO
机译:解决的问题:在不缩短光记录介质母盘曝光记录装置(LBR)的光源波长且不增大物镜的NA的情况下,获得高密度的光记录介质。作为光致抗蚀剂母盘的基底,在其上形成光致抗蚀剂层,并通过使用LBR将图案形成为与信号凹坑相对应的形状。此后,以光致抗蚀剂层作为掩模对基面进行蚀刻以获得母模6,然后通过使母模6收缩而获得收缩母7。通过在其上镀覆金属而获得模9。通过使用压模9作为金属模具来执行注射成型,并在其上沉积记录膜等以制造高密度的光学记录介质。版权所有:(C)2001,JPO

著录项

  • 公开/公告号JP2001155386A

    专利类型

  • 公开/公告日2001-06-08

    原文格式PDF

  • 申请/专利权人 MATSUSHITA ELECTRIC IND CO LTD;

    申请/专利号JP19990333912

  • 发明设计人 TSUKUDA MASAHIKO;

    申请日1999-11-25

  • 分类号G11B7/26;B29C33/38;

  • 国家 JP

  • 入库时间 2022-08-22 01:27:05

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