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CONTRACTION MOTHER, CONTRACTION FATHER AND MANUFACTURING METHOD THEREFOR
CONTRACTION MOTHER, CONTRACTION FATHER AND MANUFACTURING METHOD THEREFOR
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机译:母体,母体及其制造方法
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摘要
PROBLEM TO BE SOLVED: To obtain an optical recording medium of high density without shortening wavelength of a light source of an optical recording medium master disk exposure recording device (LBR) and without enlarging NA of an objective lens.;SOLUTION: A contractible material is used as a base of a photoresist master disk, a photoresist layer is formed thereon and patterning is executed to a shape corresponding to a signal, pit by using the LBR. Thereafter a base surface is subjected to etching with the photoresist layer as a masking to obtain a mother stamper 6 and then a contraction mother 7 is obtained by contracting the mother stamper 6. A stamper 9 is obtained by plating metal thereon. Injection molding is executed by using the stamper 9 as a metallic mold and a recording film or the like is deposited thereon to manufacture the optical recording medium of high density.;COPYRIGHT: (C)2001,JPO
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