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METAL ION REDUCTION OF AMINOAROMATIC CHROMOPHORES AND THEIR USE IN THE SYNTHESIS OF LOW METAL BOTTOM ANTI-REFLECTIVE COATINGS FOR PHOTORESISTS
METAL ION REDUCTION OF AMINOAROMATIC CHROMOPHORES AND THEIR USE IN THE SYNTHESIS OF LOW METAL BOTTOM ANTI-REFLECTIVE COATINGS FOR PHOTORESISTS
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机译:铝铬酸盐金属离子的还原及其在光阻剂低金属底部抗反射涂层的合成中的应用
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摘要
The present invention provides a process for producing bottom anti-reflective coating compositions having a very low level of metal ions utilizing specially treated anion exchange resins. The present invention also provides a method for producing semiconductor devices by producing photoimages on a substrate using such bottom anti-reflective coating compositions.
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