Method For Manufacturing A Langasite Single Crystal Substrate A Langasite Single Crystal Substrate and A Piezoelectric Device

摘要

PURPOSE: To provide a method for producing a langasite-based single crystal substrate capable of obtaining good surface state at a relative low temperature for a short time without forming a film on substrate surface by etching. CONSTITUTION: This method for producing a langasite-based single crystal substrate comprises a step for polishing at least either one main face of a raw material substrate and a step for carrying out wet etching of main face of the polished substrate in a solution containing H3PO4, HNO3 and CH3COOH.