Luminescent material for light emitting element, comprises silicon and nitrogen, with the amount of silicon higher than stoichiometric amount of silicon in silicon nitride

摘要

Luminescent material consist of silicon and nitrogen as principal component, and has amorphous structure. The amount of silicon is higher than the stoichiometry theoretical amount of silicon in silicon nitride. The material shows a peak at light emission intensity of 2.2 eV. An Independent claim is also included for manufacture of luminescent material. Silane (SiH4) and ammonia (NH3) as raw material gas is deposited between 600-1400 deg C on a substrate by reduced pressure chemical gaseous phase deposition or chemical gaseous phase deposition method at a gas flow rate of SiH4/(SiH4+NH3) to 0.1 or more.