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Mechanism for bow reduction and critical dimension control in etching silicon dioxide using hydrogen-containing additive gases in fluorocarbon gas chemistry
Mechanism for bow reduction and critical dimension control in etching silicon dioxide using hydrogen-containing additive gases in fluorocarbon gas chemistry
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机译:在碳氟化合物气体化学中使用含氢添加剂气体蚀刻二氧化硅的弓形减小机理和临界尺寸控制
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摘要
A method of etching an oxide layer in a plasma etching reactor is disclosed. The method includes the steps of providing a semiconductor substrate including the oxide layer into the plasma etching reactor and flowing an etching gas that includes a fluorocarbon gas, a nitrogen reactant gas, an oxygen reactant gas, an inert carrier gas, and a hydrogen-containing additive gas into the plasma etching reactor. The method further includes etching an opening at least partially through the oxide layer using a plasma that is formed from the etching gas.
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