Measuring probe for detection of IC signals has lever arm of high conductivity material covered by insulation layer provided with window at apex of probe point

摘要

The measuring probe has a lever arm provided with a probe point at its free end and made of a high conductivity material (14), e.g. doped crystalline silicon, covered by an extremely thin insulation layer (15), e.g. of silicon oxide, with a window (16) in the insulation layer at the apex of the probe point. The lever arm is contacted via a metal layer (17) applied over an opening in the insulation layer. Also included are Independent claims for the following: (a) a manufacturing method for a measuring probe; (b) a measuring system using a measuring probe