Method for converting laser beams into X-rays like EUV rays uses amplitude/phase-modulated sub-nanosecond impulses to create plasma that has high radiation conversion efficiency and is generated by the laser beams.

摘要

A laser (1) generates impulses (2) in a sub-nanosecond range that are modulated for their amplitude and/or phase level by a pulse shaper (3). The modulated laser impulses (4) are deflected onto a solid body target (6) via an adjusted achromatic lens (5) acting as a focussing lens and made to react by this. This produces plasma with EUV radiation (7) and its intensity is measured by a EUV-sensitive diode (8) and fed to a computer (10) as a digitalized by a back coupling.