ANTIHALATION FILTER, IMAGE ANALYZING DEVICE EQUIPPED WITH THE ANTIHALATION FILTER, DIFFRACTION DIAGRAM STRENGTH ANALYZING METHOD USING THE ANTIHALATION FILTER, AND CORRECTION PROGRAM FOR THE DIFFRACTION DIAGRAM STRENGTH

摘要

PROBLEM TO BE SOLVED: To realize an image analysis which can acquire a diffraction diagram without halation and whose contrast is good, and an image analysis which enables the analysis of strength at every respect for the diffraction diagram acquired.;SOLUTION: An image analyzing device 1 has a light receiving means 11 which optically acquires a diffraction diagram A which appears on a fluorescent plate 24 for acquiring a diffraction diagram by a reflection high-speed electron diffraction, and an antihalation filter 12 provided to transmit the visible light emitted from the diffracted diagram A of the fluorescent plate 24 on the optical path which connects the light receiving means 11 and the fluorescent plate 24. The filter 12 has been changed in the transmission factor of the visible light transmitting the filter 12 so that it is lowest at the center of the filter and it becomes higher corresponding to the distance from the center.;COPYRIGHT: (C)2003,JPO