METHOD OF MANUFACTURING MEMBRANE SAMPLE FOR SCANNING TRANSMISSION ELECTRON MICROSCOPE AND OBSERVATION METHOD FOR MEMBRANE SAMPLE METHOD FOR MEMBRANE SAMPLE

摘要

PROBLEM TO BE SOLVED: To realize a method of manufacturing a membrane sample for a scanning transmission electron microscope which is suitable for being used in the inspection of a multilayer structure in a semiconductor device and which is handled easily, and to realize an observation method for the membrane sam ple. SOLUTION: A prescribed part is shaved by an ion beam, and the membrane sample M which is parallel to a fault 16 is manufactured. A hole 17 is opened by an ion beam in a region R3 at the inside of the cut fault 16, the side face of the hole 17 is worked vertically in a membrane M, a face facing the membrane part M is worked obliquely in such a way that the area of the opening of the hole becomes larger than the area of the bottom of the hole, and a slope 18 is formed. A region R4 on the side of the fault 16 in the membrane M is cut precisely by an ion beam in order to increase the accuracy of the thickness of the membrane sample. The slope 18 of the hole 17 is coated with a material whose secondary-electron generation efficiency is high.