首页>
外国专利>
Focused ion beam apparatus having a gas injector in which one of a plurality of nozzles can be selectively driven for elevation
Focused ion beam apparatus having a gas injector in which one of a plurality of nozzles can be selectively driven for elevation
展开▼
机译:具有气体喷射器的聚焦离子束设备,其中可以选择性地驱动多个喷嘴之一以进行提升
展开▼
页面导航
摘要
著录项
相似文献
摘要
A focused ion beam apparatus has a gas injector provided with a plurality of gas supply pipes each having a nozzle at one end for ejecting a gas and a housing in which the plurality of gas supply pipes are slidably accommodated. The housing has a tip portion with a hole provided at a terminal end thereof and the hole has a size set so that only one of the nozzles can extend therefrom. In addition, the housing has a tapered nozzle guide portion for guiding a selected nozzle from a retracted position at which the selected nozzle does not extend from the hole to an extended position at which the selected nozzle extends from the hole.
展开▼