METHOD FOR OBTAINING DRIFT VALUE OF LEAK DETECTOR, METHOD FOR OBTAINING ZERO-POINT FLUCTUATION VALUE, METHOD FOR OBTAINING HUMIDITY CORRECTION COEFFICIENT, AND METHOD FOR CALIBRATING LEAKAGE DETECTOR AND THE LEAKAGE DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for calibrating a leakage detector, which can precisely determine the presence or the absence of leakage, even in a condition when especially an object to be detected is wet, relating to the leakage detector.;SOLUTION: This method for the leakage detector includes carrying out of the steps of closing the opening part of the object to be inspected by a sealing jig, applying pressurized air inside the object to be measured in this closed state, measuring the change in the pressure of the air inside the object to be measured after the elapse of a prescribed period of time, determining the presence of the leakage when the decrease in the pressure of the air is large, and determining the absence of the leakage when the decrease in the pressure of the air is small, obtaining and storing a drift correction value, using a dried objected to be measured having no leakage for each temperature difference between the object to be measured and the sealing jig, and furthermore change in the vapor pressure in a state, in which the object to be measured is wet is measured so as to obtain the humidity correction coefficient k from this change in the vapor pressure. Accordingly, the drift correction and the humidity correction are carried out, according to the drift correction value and the humidity correction coefficient.;COPYRIGHT: (C)2004,JPO&NCIPI