HIGH-FREQUENCY MAGNETIC THIN FILM, COMPOUND MAGNETIC THIN FILM, AND MAGNETIC ELEMENT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a magnetic thin film that is high in resistance and demonstrates high permeability and performance index in a high-frequency band of GHz.;SOLUTION: The magnetic thin film is a high-frequency magnetic thin film 1 having a multi-layer film structure that is formed by alternately piling up a Co-based amorphous alloy layer 3 and a T-L composition (e.g. Fe-C) layer 7.;COPYRIGHT: (C)2004,JPO