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SOI semiconductor integrated circuit for eliminating floating body effects in SOI MOSFETs and method of fabricating the same

机译:用于消除SOI MOSFET中的浮体效应的SOI半导体集成电路及其制造方法

摘要

A silicon-on-insulator (SOI) integrated circuit and a method of fabricating the SOI integrated circuit are provided. At least one isolated transistor active region and a body line are formed on an SOI substrate. The transistor active region and the body line are surrounded by an isolation layer which is in contact with a buried insulating layer of the SOI substrate. A portion of the sidewall of the transistor active region is extended to the body line. Thus, the transistor active region is electrically connected to the body line through a body extension. The body extension is covered with a body insulating layer. An insulated gate pattern is formed over the transistor active region, and one end of the gate pattern is overlapped with the body insulating layer.
机译:提供了绝缘体上硅(SOI)集成电路和制造SOI集成电路的方法。至少一个隔离的晶体管有源区和主体线形成在SOI衬底上。晶体管有源区和主体线被隔离层围绕,该隔离层与SOI衬底的掩埋绝缘层接触。晶体管有源区的侧壁的一部分延伸到主体线。因此,晶体管有源区通过体延伸部电连接到体线。主体延伸部覆盖有主体绝缘层。在晶体管有源区上方形成绝缘栅图案,并且该栅图案的一端与体绝缘层重叠。

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