首页> 外国专利> Method for forming a monolayer film for deposition on a substrate comprises injecting a thin liquid film containing dispersed chemically treated particles over the surface of a rotating drum to form a uniform monolayer of molecules or atoms

Method for forming a monolayer film for deposition on a substrate comprises injecting a thin liquid film containing dispersed chemically treated particles over the surface of a rotating drum to form a uniform monolayer of molecules or atoms

机译:形成用于沉积在基板上的单层膜的方法包括:在旋转鼓的表面上注入包含分散的经过化学处理的颗粒的液体薄膜,以形成均匀的分子或原子单层

摘要

The chemical characterists of the particles (3) such as molecules or atoms, are adjusted through an injection module and conduits (10,11) before being injected (9) on to a rotating cylinder (1). Following the cylinder round, the particles (3) dispersed in the thin liquid film (2) come to the surface. The thin monolayer film (5) thus formed is then carried across the surface of a device (12) for transfer by the conveyor system (16,18) to be deposited on a substrate.
机译:在被喷射(9)到旋转圆柱体(1)上之前,通过喷射模块和导管(10,11)调节颗粒(3)的化学特征,例如分子或原子。随着圆柱体的旋转,分散在液体薄膜(2)中的颗粒(3)到达表面。然后将如此形成的单层薄膜(5)跨过设备(12)的表面,以通过输送机系统(16,18)进行传输,以沉积在基板上。

著录项

  • 公开/公告号IT1320258B1

    专利类型

  • 公开/公告日2003-11-26

    原文格式PDF

  • 申请/专利权人 NANO WORLD PROJECTS CORPORATION;

    申请/专利号IT2000TO00878

  • 发明设计人 MARINONI GIORGIO;

    申请日2000-09-20

  • 分类号

  • 国家 IT

  • 入库时间 2022-08-21 23:07:30

相似文献

  • 专利
  • 外文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号