Optical scanner, laser image projector adopting the optical scanner, and method of driving the laser image projector

摘要

An optical scanner, a laser image projector using the optical scanner, and a method of driving the laser image projector are provided. The optical scanner includes: a base substrate (5); a plurality of parallel stationary comb electrodes (4) arranged on the base substrate (5) extending upwards at right angle; a stage (1a) having a mirror side at its top side, being separated a predetermined distance above the base substrate: a plurality of parallel driving comb electrodes (3) arranged on the bottom of the stage (1a) extending at right angles interdigitated with the stationary comb electrodes; torsion bars (2) formed at both side edges of the stage with a predetermined length to provide pivot support of the stage; and supports (6) for supporting the torsion bars such that the stage is suspended above the base substrate. The laser image projector includes the optical scanners using micro mirrors, instead of a horizontal scanning rotating polygonal mirror and a vertical scanning galvanometer, and is driven such that a single horizontal left-to-right scanning is followed by another right-to-left horizontal scanning without redundant flyback interval. Therefore, comparing with a driving method which needs quick returning 5-10 times faster than horizontal scanning rate, the driving speed can be markedly reduced, so that high-speed driving limitations of optical scanner for high-resolution image display can be overcome.