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Soluble Polyimide for photosensitive polyimide and photosensitive polyimide composition comprising the soluble polyimide
Soluble Polyimide for photosensitive polyimide and photosensitive polyimide composition comprising the soluble polyimide
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机译:用于光敏聚酰亚胺的可溶性聚酰亚胺和包含该可溶性聚酰亚胺的光敏聚酰亚胺组合物
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摘要
PURPOSE: Provided is a soluble polyimide, which manifests high resolution and low film shrinkage on curing a micropattern, and gives a film having excellent chemical and physical properties after curing. CONSTITUTION: The soluble polyimide for a photosensitive polyimide precursor is represented by formula 1 and comprises a reactive end-capping group at either or both ends thereof, wherein X is a tetravalent aromatic or aliphatic organo-group; Y is a divalent aromatic or aliphatic organo-group; each of R1 and R2 is H or a monovalent organo-group of CH2OR3, in which R3 is a C6 or lower alkyl group, if both R1 and R2 are not H; and m is an integer of 10 to 1000.
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