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Soluble Polyimide for photosensitive polyimide and photosensitive polyimide composition comprising the soluble polyimide

机译:用于光敏聚酰亚胺的可溶性聚酰亚胺和包含该可溶性聚酰亚胺的光敏聚酰亚胺组合物

摘要

PURPOSE: Provided is a soluble polyimide, which manifests high resolution and low film shrinkage on curing a micropattern, and gives a film having excellent chemical and physical properties after curing. CONSTITUTION: The soluble polyimide for a photosensitive polyimide precursor is represented by formula 1 and comprises a reactive end-capping group at either or both ends thereof, wherein X is a tetravalent aromatic or aliphatic organo-group; Y is a divalent aromatic or aliphatic organo-group; each of R1 and R2 is H or a monovalent organo-group of CH2OR3, in which R3 is a C6 or lower alkyl group, if both R1 and R2 are not H; and m is an integer of 10 to 1000.
机译:目的:提供一种可溶性聚酰亚胺,其在固化微图案时表现出高分辨率和低膜收缩性,并且在固化后得到具有优异化学和物理性质的膜。组成:用于光敏聚酰亚胺前体的可溶性聚酰亚胺由式1表示,并且在其任一端或两端均包含反应性封端基团,其中X为四价芳族或脂族有机基团; Y是二价的芳族或脂族有机基团;如果R 1和R 2都不是H,则R 1和R 2各自为H或CH 2 OR 3的一价有机基团,其中R 3为C 6或低级烷基。 m是10到1000的整数。

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