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Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same
Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same
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机译:微加工电容式横向加速度计装置和具有该装置的整体式三轴加速度计
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摘要
A high-sensitivity and low-noise micromachined capacitive lateral accelerometer device having an input axis and a monolithic, three-axis accelerometer utilizing the device are provided. The device includes at least one electrode having a side surface normal to the input axis. A relatively large proofmass has at least one side surface normal to the input axis and extends along a width of the proofmass. The proofmass is movable against acceleration relative to the at least one electrode due to inertial force along the input axis to obtain a capacitive variation between the at least one electrode and the proofmass. The side surfaces are spaced apart to define a narrow, high-aspect ratio sensing gap which extends along substantially the entire width of the proofmass. The proofmass forms a sense capacitor with the at least one electrode.
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