3- 3- MICROMACHINED PIEZOELECTRIC THREE-AXIS GYROSCOPE AND STACKED LATERAL OVERLAP TRANSDUCER SLOT BASED THREE-AXIS ACCELEROMETER

摘要

The present disclosure is directed to a computer-readable medium having computer-readable instructions stored thereon for generating and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, 2-axis accelerometers, Systems, methods and apparatuses, including programs. Combining fabrication processes for such devices can enable monolithic integration of six inertial sensing axes on a single substrate such as a single glass substrate. Such devices may be included in a mobile device such as a mobile display device.