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Method of forming a carbon nano-material layer using a cyclic deposition technique
Method of forming a carbon nano-material layer using a cyclic deposition technique
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机译:使用循环沉积技术形成碳纳米材料层的方法
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摘要
A method of forming a carbon nano-material layer may involve a cyclic deposition technique. In the method, a chemisorption layer or a chemical vapor deposition layer may be formed on a substrate. Impurities may be removed from the chemisorption layer or the chemical vapor deposition layer to form a carbon atoms layer on the substrate. More than one carbon atoms layer may be formed by repeating the method.
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