CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, DIFFRACTION GRATING PHASE SIFTER, AND REFLECTIVE DIFFRACTION GRATING PHASE SHIFTER

摘要

PROBLEM TO BE SOLVED: To provide a phase shifter that can be manufactured at relatively low costs and does not substantially produce chromatic aberration.;SOLUTION: The phase shifter (1) comprises a group of reflection diffraction gratings (10) having a first grating pitch (p), and one reflection diffraction grating (11) that is formed in the group of reflection diffraction gratings to have a second grating pitch (p') different from the first grating pitch. The second grating pitch is set to be approximately half the first grating pitch, and the diffraction grating is a blazed grating. Furthermore, the phase shifter is formed by, for example, a replica generation technique.;COPYRIGHT: (C)2006,JPO&NCIPI