METHOD FOR MANUFACTURING FINE STRUCTURE BODY, RESIN MOLDING METHOD USING FINE STRUCTURE BODY, AND THE FINE STRUCTURE BODY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing fine structural bodies with which a three-dimensional fine structure body can be formed easily, without relatively moving a mask and a substrate, to provide a resin molding method using fine structure body, and to provide the fine structure body.;SOLUTION: In the method for manufacturing a fine structural body, a fine structural body is formed by exposing a resist layer 31 to X-rays from an X-ray light source 1 via an exposure mask 11 and using the resist layer 31 having exposed regions 41, 42 by exposure, and the method includes an exposure step of exposing the resist layer 31 by inserting a filter 21 between the X-ray light source 1 and the exposure mask 11. Divergence of the exposure light can be controlled, by inserting or not inserting the filter 21 and by changing kinds of the filter 21 or the like. A three-dimensional fine structural body can be formed readily by using the resist layer.;COPYRIGHT: (C)2006,JPO&NCIPI