Inert-gas halide molecule producing method for ozonizer, involves producing module, where electrical field strength is strongly inhomogeneous, so that module moves in area of very low electrical field strength and low electron temperature

摘要

The method involves producing a module e.g. excited inert-gas atoms and halide atoms, from filling gas in high frequency or microwave plasma. The electrical field strength linked into a discharge tube is strongly inhomogeneous, so that the module moves into an area of very low electrical field strength and low electron temperature. The field strength is produced between two conductors (2a, 2b). An independent claim is also included for an ultra violet (UV) lamp.