METHOD OF MANAGING SEAL MEMBER AND SYSTEM OF MANAGING SEAL MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a method of managing a seal member and a system of managing a seal member which actively detect deterioration of the seal member irrespective of the condition of an apparatus and easily specify a deteriorated seal member.;SOLUTION: A marker layer is formed in the seal member. The manufacturing apparatus includes a means to detect exposure of the marker layer from the seal member.;COPYRIGHT: (C)2007,JPO&INPIT