Simulation method for a semiconductor device, a recording medium storing a simulation program of a method for manufacturing a semiconductor device and a semiconductor device using a simulation method of a semiconductor device

摘要

PROBLEM TO BE SOLVED: To obtain a recording medium, which enables enhancement of the efficiency of semiconductor device development by setting a functional model which is in proportion to a power of carrier concentration and is inversely proportional to the power of impurity concentration. ;SOLUTION: A device simulation apparatus 1 is provided with an input portion 2 which accepts inputs, a process control portion 3 which performs simulative calculation, an output portion 4 which outputs the result of the calculation, a data storing portion 5 which stores specific data, and a program storing portion 6 which stores simulation programs and the like. The process control portion 3 is provided with a voltage/current setting means 7 for a terminal voltage or current conditions, a device characteristics calculating means 8, and a mobility calculating means 9. Fed with the impurity distribution and information, such as element structure of a semiconductor device obtained by process simulation, and with conditions set, the process control portion 3 simulatedly calculates the electrical characteristics of the elements. With use of a functional model, an effective mobility can be precisely reproduced over a wide range of impurity concentration by only one parameter set.;COPYRIGHT: (C)2001,JPO