Neutral beam injection device and ion beam process device for ion source and fusion reactor

摘要

PROBLEM TO BE SOLVED: To surely prevent deflection of an ion beam extracted from a perfolated electrode. SOLUTION: When an ion beam is extracted by perfolated electrodes 5, 6, 7, a deflection angle of the ion bean in an electrode central part side is enlarged compared with the ion beam in an electrode end part side to generate deflection in respective outgoing directions of the ion beam. But, for the present invention, since centers of extraction holes from an extraction hole 9a in the end part side of each step to an extraction hole 9b in the central part side out of plural beam extraction holes 9 which are provided in the electrode 7 are shifted gradually uppersides from the hole 9a toward the hole 9b, the deflected ion beam is corrected to a parallel direction by passing the beam through the ion beam extraction holes 9 of the electrode 7. Both the ion beam in the electrode central side and the ion beam in the electrode end part side are brought into parallel, thereby the outgoing efficiency of the ion beam extracted finally from an ion source is enhanced and controlled properly.