PLASMA SOURCE, HIGH FREQUENCY ION SOURCE USING IT, NEGATIVE ION SOURCE, ION BEAM PROCESSOR, NEUTRAL PARTICLE BEAM INCIDENT DEVICE FOR NUCLEAR FUSION

摘要

PPROBLEM TO BE SOLVED: To reduce plasma loss on the inner surface of a discharge tube. PSOLUTION: The discharge tube 5 constituted by insulator and a coil 3 arranged around the discharge tube 5 are provided. By applying high frequency to the coil 3, plasma is generated in the discharge tube 5. A Faraday shield 4 as a conductor is installed between the discharge tube 5 and coil 3, and has a plurality of slits 4S. A plurality of permanent magnets 6 are installed between the plurality of slits and outside the Faraday shield 4, and generate a multipole field B in the discharge tube 5. PCOPYRIGHT: (C)2008,JPO&INPIT