WAFER CASSETTE LIFTING APPARATUS AND WAFER CHIP SORTING APPARATUS PROVIDED WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a wafer cassette lifting apparatus capable of more improving the productivity of wafer chips by reducing the size of an apparatus for applying prescribed process processing to wafers and increasing the lifting speed of a wafer cassette, and to provide a wafer chip sorting apparatus provided with the wafer cassette lifting apparatus.;SOLUTION: The wafer cassette lifting apparatus is provided with: a base; a movable part mounted on the base so as to be horizontally moved; at least one link member where a plurality of link bars are linked while zigzag intersecting with each other like bellows, connecting the one side of its lower end part to the movable part so as to be rotated and allowed to be expanded and contracted in the vertical direction; a loading part formed on the upper end part of the link members and capable of loading a cassette on the upper part; and a driving part for horizontally moving the movable part only by optional length.;COPYRIGHT: (C)2007,JPO&INPIT