机译:计划具有多种晶圆类型和驻留时间限制的双手臂群集工具
School of Mechano-Electronic Engineering Xidian University Xi'an 710071 China;
School of Mechanical and Electrical Engineering Ji-angxi University of Science and Technology Ganzhou 341000 China;
School of Computer Science and Engineering College of Engineering Nanyang Technological University Singapore 639798 Singapore;