PARTIAL FORMATION METHOD OF THIN FILM, PARTIAL DEFECT RESTORATION METHOD OF THIN FILM AND DEFECT RESTORATION DEVICE OF THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a partial formation method of thin film capable of partially forming a thin film simply and efficiently without causing unevenness of film thickness.;SOLUTION: A thin film-forming material 15a including a solid component, a solidifying component and a solvent is partially dropped onto a substrate 11, the solvent is eliminated from the dropped thin film-forming material 15, the solidifying component in the thin film-forming material 15 of which the fluidity is lowered due to the removal of the solvent is softened, thereafter, the softened solidifying component is solidified, thereby, a thin film is partially formed on a defect-removed part 14 in a filter film 13 and a color filter for a liquid crystal panel is restored.;COPYRIGHT: (C)2007,JPO&INPIT