Method for constructing database for thin film defect inspection defect inspection method for thin film using the database and defect inspection apparatus for thin film including the database

摘要

Provided is a method for constructing a database for thin film defect inspection, which comprises the following steps of: preparing a reference thin film; measuring a change amount of a capacitance value according to a temperature with respect to the reference thin film and confirming defect levels according to a temperature; calculating activation energy of the defect levels; and storing, as a reference temperature, a temperature at which a reference defect level with the highest activation energy appears among the defect levels.