Nanostructured carbon material manufacturing method, nanostructured carbon material formed by the manufacturing method, and substrate having the nanostructured carbon material

摘要

A raw material gas for forming a nanostructured carbon material is formed by introducing at least a discharge gas between opposing electrodes under atmospheric pressure or a pressure near atmospheric pressure, and generating a discharge plasma by applying a high frequency voltage between the electrodes. A method for producing a nanostructured carbon material, characterized in that a nanostructured carbon material is formed on the substrate by exposing the substrate to the activated source gas as a source gas activated in the presence of the discharge plasma. .