CONTROL SYSTEM AND METHOD FOR TIME VARIANT SYSTEM CONTROL OBJECT HAVING IDLE TIME SUCH AS SINGLE CRYSTAL PRODUCING DEVICE BY CZOCHRALSKI METHOD

摘要

To accurately control a time variant system control object having an idle time such as a Czochralski method single crystal producing device (CZ equipment). The idle time, the time constant and the process gain value of a control object (CZ equipment) (200) are set. The process gain set value has specified time variant characteristics. An output value y and its first-order and second-order time differentiation values are used as the state variable x of the control object (200). A non-linear state predicting unit (206) predicts a state variable value x(t+Ld) at a future point in time after an idle time based on the current output value y, the idle time, the time constant and the process gain set value. A gain-scheduled sliding mode control unit (212) performs a gain-scheduled sliding mode control operation based on the state variable value x(t+Ld) at a predicted future point in time, an output deviation z(t+Ld) at a future point in time, the time constant and a process gain set value at a future point in time to determine the manipulated variable uT of the control object (200).