YTTRIUM OXIDE COMPOSITION, A METHOD OF FORMING THE YTTRIUM OXIDE COMPOSITION AND A METHOD OF FORMING A YTTRIUM OXIDE LAYER USING THE SAME

摘要

An yttrium oxide composition is provided to have a fine and uniform particle size distribution and be suitable for forming an yttrium oxide layer of proper thickness when coated onto a substrate using a spray step. A method for preparing an yttrium oxide composition includes the steps of: dissolving an yttrium salt in a solvent to prepare an yttrium salt solution; and adding a basic compound to the yttrium salt solution to adjust a pH value to 3.7-7, thereby forming yttrium oxide(Y2O3) particles having a particle size of 25 nm or smaller. The yttrium salt comprises at least one material selected from the group consisting of yttrium nitrate, yttrium acetate, and yttrium chloride.