CHARACTERISTIC ANALYSIS METHOD AND DEVICE, ABNORMAL-EQUIPMENT ESTIMATION METHOD AND DEVICE, PROGRAM THAT ALLOWS COMPUTER TO EXECUTE CHARACTERISTIC ANALYSIS METHOD OR ABNORMAL-EQUIPMENT ESTIMATION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM THAT RECORDS PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a characteristic analysis method that allows a user to highly accurately classify a plurality of substrates, whose characteristic values are measured, into each group having a similar characteristic distribution without requiring knowledge regarding a manufacturing process even if characteristic-distribution fluctuation occurs to some extent.;SOLUTION: A plurality of characteristic values regarding a substrate group as a classification target are classified into each similar-characteristic-value group having similar properties (S103). The characteristic values included in the similar-characteristic-value group are summed for each similar-characteristic-value group regarding each substrate included in the substrate group so as to calculate features of the characteristic distribution for each similar-characteristic-value group regarding each substrate (S104). Each substrate is classified into each similar-substrate group, having a similar characteristic distribution on the substrate, on the basis of the features of the characteristic distribution for each similar-characteristic-value group regarding each substrate (S105).;COPYRIGHT: (C)2008,JPO&INPIT