AMPLITUDE MEASURING METHOD AND FREQUENCY MEASURING METHOD OF ULTRASONIC HORN, MEASURING INSTRUMENT USING METHOD, AND ULTRASONIC BONDING DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide a measuring method capable of performing easily amplitude measurement and frequency measurement of an ultrasonic horn, a measuring instrument using the method, and its ultrasonic bonding device.;SOLUTION: The measuring instrument includes a CCD camera having an enlargement magnification or an equal magnification for imaging the amplitude of the ultrasonic horn, a density detection part for detecting a density change of an image taken by the CCD camera, a distance measuring processing part for calculating the distance between a dense part and a pale part based on the density change detected by the density detection part, and an amplitude measuring part for measuring the amplitude of the ultrasonic horn from the distance between the dense part and the pale part calculated by the distance measuring processing part. The amplitude of the ultrasonic horn is taken by the CCD camera and then enlarged by image processing, and the amplitude and a resonance frequency of the ultrasonic horn are measured by utilizing an image in the amplitude state acquired at that time.;COPYRIGHT: (C)2008,JPO&INPIT